The new electron beam writer housed in the Nano3 cleanroom
facility at the Qualcomm Institute is important for electrical engineering
professor Shadi Dayeh’s two major areas of research. He is developing
next-generation, nanoscale transistors for integrated electronics; and he is
developing neural probes that have the capacity to extract electrical signals
from individual brain cells and transmit the information to a prosthetic device
or computer. Achieving this level of signal extraction or manipulation requires
tiny sensors spaced very closely together for the highest resolution and signal
acquisition. Enter the new electron beam writer.